2000 IEEE.
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IEEE Journal of Lightwave Technology
Volume 18 Number 3, March 2000
Table of Contents for this issue
Complete paper in PDF format
High-Efficiency Unitraveling-Carrier
Photodiode with an Integrated Total-Reflection Mirror
Hiroshi Ito, Member, IEEE Tomofumi Furuta, Satoshi Kodama and Tadao Ishibashi Member, IEEE
Page 384.
Abstract:
A novel photodiode (PD) structure with an integrated total-reflection
mirror which can enhance the quantum efficiency in back-illuminated geometry
is proposed. Due to the diagonal propagation of the reflected light at the
total-reflection mirror through the absorption layer, the efficiency is improved
by about 50% from that of the normally irradiated case. By employing a unitraveling-carrier
structure together with a thick absorption layer of 4700 A, the fabricated
PD exhibits a high responsivity of 0.65 A/W, a high 3-dB bandwidth of 50 GHz,and a high-output voltage of 5 V, simultaneously.
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