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IEEE Microwave and Guided Wave Letters
Volume 10 Number 5, May 2000

Table of Contents for this issue

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Characterization of Thin-Film Low-Dielectric Constant Materials in the Microwave Range Using On-Wafer Parallel-Plate Transmission Lines

Ge Song, Stéphane Follonier, André Knoesen, Senior Member, IEEE and Robert D. Miller

Page 183.

Abstract:

A method is presented to measure the dielectric properties of a thin film over a broad microwave frequency range. The parallel-plate transmission line geometry offers both the advantages of pronounced sensitivity to thin-film properties and exact computation of the value of the dielectric constant and the loss tangent. With multiline thru-reflect-line calibration techniques,the dielectric constant and loss tangent are determined to an accuracy better than 4% at 10 GHz.

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