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IEEE Transactions on Microwave Theory and Techniques
Volume 48 Number 12, December 2000

Table of Contents for this issue

Complete paper in PDF format

A Low-Voltage Actuated Micromachined Microwave Switch Using Torsion Springs and Leverage

Dooyoung Hah, Euisik Yoon, Member, IEEE and Songcheol Hong Member, IEEE

Page 2540.

Abstract:

In this paper, a push-pull type microwave switch is proposed,which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is 5 V. The insertion loss of 1 dB and the isolation as high as 40 dB at 1 GHz are achieved by the push-pull operation.

References

  1. L. E. Larson, R. H. Hackett, M. A. Melendes and R. F. Lohr, "Micromachined microwave actuator (MIMAC) technology-A new tuning approach for microwave integrated circuits", in IEEE Microwave Millimeter-Wave Monolithic Circuit Symp. Dig., Boston, MA, June 10-11 1991, pp.  27- 30. 
  2. J. J. Yao and M. F. Chang, "A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz", in 8th Int. Solid-State Sens. Actuators Eurosens. Conf. , Stockholm, Sweden,June 25-29 1995, pp.  384-387. 
  3. C. Goldsmith, J. Randall, S. Eshelman and T. H. Lin, "Characteristics of micromachined switches at microwave frequencies", in IEEE MTT-S Int. Microwave Symp. Dig., San Francisco, CA, June 18-20 1996, pp.  1141-1144. 
  4. S. Pacheco, C. T. Nguyen and L. P. B. Katehi, "Micromechanical electrostatic K -band switches", in IEEE MTT-S Int. Microwave Symp. Dig. , Baltimore, MD, June 9-11 1998, pp.  1569-1572. 
  5. C. Goldsmith, Z. Yao, S. Eshelman and D. Denniston, "Performance of low-loss RF MEMS capacitive switches", IEEE Microwave Guided Wave Lett., vol. 8, pp.  269-271, Aug.  1998.
  6. D. Hyman, A. Schmitz, B. Warneke, T. Y. Hsu, J. Lam, J. Brown, J. Schaffner, A. Walston, R. Y. Loo, G. L. Tangonan, M. Mehregany and J. Lee, "GaAs-compatible surface-micromachined RF MEMS switches", Electron. Lett., vol. 35, pp.  224-226, Feb.  1999.
  7. J. B. Muldavin and G. M. Rebeiz, "30 GHz tuned MEMS switches", in IEEE MTT-S Int. Microwave Symp. Dig., Anaheim, CA, June 14-17 1999, pp.  1511-1514. 
  8. K. Suzuki, S. Chen, T. Marumoto, Y. Ara and R. Iwata, "A micromachined RF microswitch applicable to phased-array antennas", in IEEE MTT-S Int. Microwave Symp. Dig., Anaheim, CA, June 14-17 1999, pp.  1923- 1926. 
  9. J. Park, G. Kim, K. Chung and J. Bu, "Electroplated RF MEMS capacitive switches", in 13th Int. IEEE MEMS Conf. Tech. Dig., Miyazaki, Japan,Jan. 23-27 2000, pp.  639-644. 
  10. V. Milanovic, M. Maharbiz, A. Singh, B. Warneke, N. Zhou, H. K. Chan and K. S. J. Pister, "Microrelays for batch transfer integration in RF systems", in 13th Int. IEEE MEMS Conf. Tech. Dig., Miyazaki, Japan,Jan. 23-27 2000, pp.  787-792.