4 July 1998
Source: Hardcopy from Peter Leitner

## Table 6

## FUTURE WEAPON SYSTEMS: Microelectronic Technologies Required

X ESSENTIAL # IMPORTANT O HELPFUL | Ship-to- Air Missiles | Shipborne Laser Weapons | Shipborne Phased Array Radar | Short- range Attack Missiles | Short- range SAM | SIGINT Satellite | Small ACLM | Small GLCM | Small SLCM | Solid SLBM | Space Event Support Ship | Space Station | Space Tug | SSBN | Surface Combatant | Tank- Launched ATGM | Tank | Tilt- Rotor Aircraft | Torpedo Attack Submarine | Torpedoes
Automated Production | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
CAD Equipment | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Chemical Plasma Etchers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Clean Room Design and Filters | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Czochralski Crystal Pullers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
E-Beam Mask Makers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Epitaxial Growth (VPE, MBE) | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
High-Power Packing Know-How | X |  |  | # |  | # | # | # | # |  | X |  |  |  | X |  | O |  |  | X
High-Purity Polysilicon | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
High-Speed Gate Know-How | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Ion Implanters | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Ion Millers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Know-How to Optimize for Military |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Low-Pressure CVD | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Magnetically-Enhanced Sputtering | X |  |  | # |  | # | # | # | # |  | X |  |  |  | X |  | O |  |  | X
Materials Characterization | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Optimized Layout Know-How | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Parametric Testers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Reactive Ion Etchers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Scanning & Stepping Proj. Aligners | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
VLSI Circuit Testers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Wafer Probe Testers | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
Wire Bonders | X |  | X | X |  | # | X | # | # | X | X | # | O | X | X | # | X | X | X | X
100+ Pin Packaging Know-How | X |  |  | # |  |  |  |  |  |  | X |  |  |  | X |  |  |  |  | X