4 July 1998
Source: Hardcopy from Peter Leitner

## Table 4

## FUTURE WEAPON SYSTEMS: Microelectronic Technologies Required

X ESSENTIAL # IMPORTANT O HELPFUL | A-A Missiles | Acoustic ASW Sensors | Acoustic Sensing Sys. | Air Superior. Fighter | Air- Launched Cruise Missiles | Air to Surface Missiles | Aircraft Bombs | AN-12 Class Tactical Transport | AN-124 Class Strategic Transport | Anti- personnel Weapon | Anti- aircraft Gun | Anti- sensor Laser | Artillery Ammun- ition | Artillery | ASAT | Astronomy Satellites | ASW Missiles | Attack Helicopter | Ballistic Missile Radars | Bomber | BW/CW Munitions and Production | Carrier Based CTOL Fighter | Counter- air Fighter | Cruise Missile Attack Submarine | Endo- atmospheric ABM | Exo- atmospheric ABM | Ground Attack Fighter | Ground Based AD Radar | Handheld ATGM
Automated Production | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
CAD Equipment | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Chemical Plasma Etchers | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Clean Room Design and Filters | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Czochralski Crystal Pullers | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
E-Beam Mask Makers | X |  | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Epitaxial Growth (VPE, MBE) | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
High-Power Packing Know-How | # |  |  | X |  |  |  |  |  |  | X |  |  |  | X |  | # | X | X | X |  | X | X |  |  |  | X | X |
High-Purity Polysilicon | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
High-Speed Gate Know-How | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Ion Implanters | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Ion Millers | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Know-How to Optimize for Military |  |  |  | X |  |  |  |  |  |  | X |  |  |  |  |  |  | # | X | X |  |  | X |  |  |  | X |  |
Low-Pressure CVD | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Magnetically-Enhanced Sputtering | # |  |  | X |  |  |  |  |  |  | X |  |  |  | X |  | # | X | X | X |  | X | X |  |  |  | X | X |
Materials Characterization | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Optimized Layout Know-How | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Parametric Testers | X | X | X | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Reactive Ion Etchers | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Scanning & Stepping Proj. Aligners | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
VLSI Circuit Testers | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Wafer Probe Testers | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
Wire Bonders | X |  | # | X | X | X |  |  |  |  | X |  | # |  | X | # | # | X | X | X | X | X | X | X | X | # | X | X |
100+ Pin Packaging Know-How | # |  |  | X |  |  |  |  |  |  | X |  |  |  | X |  | # | X | X | X | X |  | X | X |  |  | X | X |