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IEEE Microwave and Guided Wave Letters
Volume 10 Number 1, January 2000

Table of Contents for this issue

Complete paper in PDF format

Low-Loss Distributed MEMS Phase Shifter

Andrea Borgioli, Yu Liu, Amit S. Nagra and Robert A. York

Page 7.

Abstract:

This letter presents a one-bit low-loss K/Ka -band phase shifter circuit that employs microelectromechanical systems (MEMS) capacitors. The measured results demonstrate a delay line with a 180° phase shift/1.17 dB loss phase shift at 25 GHz, 270° phase shift/1.69 dB loss at 35 GHz, and a return loss better than 11 dB over a 0-35-GHz band. The state-of-the-art insertion loss performance, 154°/dB at 25 GHz and 160°/dB at 35 GHz, demonstrates the potential for the implementation of a very low-loss multibit digital MEMS phase shifter.

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