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IEEE Microwave and Guided Wave Letters
Volume 10 Number 9, September 2000

Table of Contents for this issue

Complete paper in PDF format

A Micromachined 585 GHz Schottky Mixer

K. Hui, Member, IEEE Jeffrey L. Hesler, Member, IEEE David S. Kurtz, William L. Bishop, Member, IEEE and Thomas W. Crowe Senior Member, IEEE

Page 374.

Abstract:

Standard semiconductor fabrication processes have been used to form waveguide components for the submillimeter wavelength range. A 585 GHz fundamentally pumped Schottky mixer with record performance demonstrates this technology. It consists of an etched silicon horn, a diced waveguide, and a lithographically formed microstrip channel for the diode circuit. The block dimensions are precisely controlled and extremely sharp. The measured mixer noise temperature is 1200K (DSB), which is equivalent to the best result obtained with standard metal machining.

References

  1. S. M. Marazita, W. L. Bishop, J. L. Hesler, K. Hui, W. E. Bowen and T. W. Crowe, "Integrated GaAs Schottky mixers by spin-on-dielectric wafer bonding", IEEE Trans. Electron Devices, vol. 47, pp.  1152-1157, June  2000.
  2. I. Mehdi, M. Mazed, R. Dengler, A. Pease, M. Natzic and P. H. Siegel, "Planar GaAs Schottky diodes integrated with quartz substrate circuitry for waveguide subharmonic mixers at 215 GHz", in IEEE Int. Microwave Symp. 1994 Dig., San Diego, CA, May 1994, pp.  779-782. 
  3. P. H. Siegel, I. Mehdi, R. J. Dengler, T. H. Lee, D. A. Humphrey, A. Pease, R. Zimmermann and P. Zimmermann, "A 640 GHz planar-diode fundamental mixer/receiver", in 1998 IEEE MTT-S Int. Microwave Symp. Dig., June 1998, pp.  407-410. 
  4. J. L. Hesler, W. R. Hall, T. W. Crowe, R. M. Weikle, B. S. Deaver, R. F. Bradley and S.-K. Pan, "Fixed tuned submillimeter wavelength mixers using planar Schottky barrier diodes", IEEE Trans. Microwave Theory Tech., vol. 45, pp.  653-658, May  1997.
  5. C. M. Mann, D. N. Matheson, M. L. Oldfield, P. J. Koh, T. W. Crowe, W. L. Bishop, R. M. Weikle and J. L. Hesler, "A simple micromachining technique for millimeter, submillimeter and terahertz waveguide cavities", in Proc. 2nd ESA Workshop Millimeter Wave Technology and Applications, Helsinki, Finland,May 1998, pp.  144-149. 
  6. C. M. Mann, J. L. Hesler, P. J. Koh, T. W. Crowe, W. L. Bishop, R. M. Weikle and D. N. Matheson, "A versatile micromachined horn antenna", in 20th ESTEC Antenna Workshop Millimeter Wave Antenna Technology and Antenna Measurements, Noordwijk, NL, June 1997.
  7. T. W. Crowe, P. J. Koh, W. L. Bishop, C. M. Mann, J. L. Hesler, R. M. Weikle, P. A. D. Wood and D. Matheson, "Inexpensive receiver components for millimeter and submillimeter wavelengths", in Proc. 8th Int. Symp. Space THz Tech. , Cambridge, MA, Mar. 25-27 1997.
  8. J. L. Hesler, K. Hui, R. K. Dahlstrom, R. M. Weikle, T. W. Crowe, C. M. Mann and H. B. Wallace, "Analysis of an octagonal micromachined horn antenna for submillimeter-wave applications", IEEE Trans. Antennas Propagat.,
  9. K. Y. Lee, N. LaBianca, S. A. Rishton, S. Zolgharnain, J. D. Gelorme, J. Shaw and T. H.-P. Chang, "Micromachining applications of a high resolution ultrathick photoresist", J. Vac. Sci. Technol. B, vol. 13, no. 6, pp.  3012-3016, Nov./Dec.  1995.