2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

IEEE Microwave and Guided Wave Letters
Volume 10 Number 10, October 2000

Table of Contents for this issue

Complete paper in PDF format

K-Band 3-Bit Low-Loss Distributed MEMS Phase Shifter

Yu Liu, Andrea Borgioli, Amit S. Nagra and Robert A. York

Page 415.

Abstract:

In this letter, we present a 3-bit K-band distributed phase shifter circuit that employs microelectromechanical systems (MEMS) capacitive switches. The measured results demonstrate an average 1.7 dB insertion loss at 26 GHz with return loss better than -7 dB. Insertion phase shifts of all switching states are measured and show phase error less than 8.5° for all states. The low loss K-band 3-bit phase shifter demonstrated in this letter can potentially be extended to more-bit-controlled phase shifter applications.

References

  1. C. Goldsmith, T. H. Lin, B. Powers, W. R. Wu and B. Norvell, "Micromechanical membrane switches for microwave applications", 1995 IEEE MTT-S Dig., pp.  91-94, 
  2. E. Brown, "RF-MEMS switches for reconfigurable integrated circuits", IEEE Trans. Microwave Theory Tech., vol. 46, pp.  1868-1880, Nov.  1998.
  3. E. K. Chan, E. C. Kan, R. W. Dutton and P. M. Pinsky, "Nonlinear dynamic modeling of micromachined switches", 1997 IEEE MTT-S Dig., pp.  1511-1514, 
  4. A. Borgioli, Y. Liu, A. S. Nagra and R. A. York, "Low-loss distributed MEMS phase shifter", IEEE Microwave Guided Wave Lett., vol. 10, pp.  7-10, Jan.  2000.
  5. J. S. Hayden and G. M. Rebeiz, "Low-loss cascadable MEMS distributed X-band phase shifters", IEEE Microwave Guided Wave Lett., vol. 10, pp.  142-144,  Apr.  2000.
  6. N. S. Barker and G. M. Rebeiz, "Distributed MEMS true-time delay phase shifters and wide-band switches", IEEE Microwave Guided Wave Lett., vol. 46, pp.  1881-1890,  Nov.  1998.
  7. A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke and C. L. Goldsmith, "X-band RF MEMS phase shifters for phased array applications", IEEE Microwave Guided Wave Lett., vol. 9, pp.  517-519, Dec.  1999.
  8. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke and C. Goldsmith, "Ka-band RF MEMS phase shifters", IEEE Microwave and Guide Wave Lett., vol. 9, no. 12, pp.  520-522, Dec.  1999.
  9. A. S. Nagra and R. A. York, "Distributed analog phase shifters with low insertion loss", IEEE Trans. Microwave Theory Tech., vol. 47, pp.  1705-1711, Sept.  1999.