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IEEE Microwave and Guided Wave Letters
Volume 10 Number 12, December 2000

Table of Contents for this issue

Complete paper in PDF format

2-Bit MEMS Distributed X-Band Phase Shifters

Joseph S. Hayden, Student Member, IEEE and Gabriel M. Rebeiz Fellow, IEEE

Page 540.

Abstract:

A wideband distributed coplanar-waveguide (CPW) phase shifter has been developed for X-band operation. The design is based on the distributed MEMS transmission line (DMTL) loaded with MEMS bridges and MIM capacitors. A 2-bit distributed phase shifter was fabricated on a 500-µ m quartz substrate, and achieved a true-time delay operation from 1 to 20 GHz with a reflection coefficient less than - 11 dB from 2 to 20 GHz and above. Insertion loss is dominated by a low-Q MIM capacitor (14 at 10 GHz) and the effect of this Q is shown. Increasing the MIM capacitor Q will result in an excellent 2-bit phase shifter with wideband performance at X-band frequencies.

References

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